Switch Performance
Fabricated Switch
Microscope image of a fabricated switch.
Series of Optimized Switches
Images are height profiles of actual switches.
a. Switch optimized for stiffness
b. Switch optimized for flatness
c-g. Switches optimized for minimum stress stiffening, with varying degrees of constraints on flatness.
a. Switch optimized for stiffness
b. Switch optimized for flatness
c-g. Switches optimized for minimum stress stiffening, with varying degrees of constraints on flatness.
Series Performance
Actuation performance of fabricated switches vs. temperatures, illustrating the compromise that exists between stress stiffening (due to temperature change here), and flatness.
In general, the flatter the switch, the more likely it is to stress stiffen, in this case resulting in large shifts in actuation voltage as temperature varies. More deflected switches tend to be more stable with temperature.
In general, the flatter the switch, the more likely it is to stress stiffen, in this case resulting in large shifts in actuation voltage as temperature varies. More deflected switches tend to be more stable with temperature.
Model accuracy
Our models were verified by comparing measured and simulated values of stiffness.