Operation Principle and Design Space
The RF switch is electrostatically actuated by a 45um electrode placed ~1um beneath the switch membrane. The membrane itself is ~1um thick, and is suspended by 4 anchors, each placed ~100um from the center.
Black areas are pre-designed and remain fixed. Grey ares are optimized, and are thus called the design area.
Switches deflect due to stress gradients across the switch membrane which result from the fabrication procedure.
Switches can stress stiffen due to changes in in-plane stresses.
Black areas are pre-designed and remain fixed. Grey ares are optimized, and are thus called the design area.
Switches deflect due to stress gradients across the switch membrane which result from the fabrication procedure.
Switches can stress stiffen due to changes in in-plane stresses.